RF bulk acoustic wave resonators and filters

Journal of Electroceramics

Volumn 12, Issue 1-2, 2004, Pages 109-118

  Loebl, H P ^a   Metzmacher, C ^a   Milsom, R F ^b   Lok, P ^c   Van Straten, F ^c   Tuinhout, A ^c  

^a PHILIPS RESEARCH LABORATORIES   (Germany)

^b PHILIPS RESEARCH LABORATORIES   (Netherlands)

^c NXP SEMICONDUCTORS   (Netherlands)

Author keywords

AIN; Bulk acoustic wave resonator; RF filter

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; COMPUTER SIMULATION; DEPOSITION; ELECTRODES; ELECTROMAGNETISM; INDUCTANCE; MICROELECTROMECHANICAL DEVICES; MOBILE TELECOMMUNICATION SYSTEMS; PERMITTIVITY; PIEZOELECTRIC DEVICES; RESONATORS; SCANNING ELECTRON MICROSCOPY;

ACOUSTIC ENERGY; BRAGG MIRRORS; BULK ACOUSTIC WAVE RESONATORS; PIEZOELECTRIC FILMS;

WAVE FILTERS;

EID: 3142674267     PISSN: 13853449     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:JECR.0000034005.21609.91     Document Type: Article

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