Piezoelectric properties of polycrystalline AlN thin films for MEMS application

Sensors and Actuators, A: Physical

Volumn 132, Issue 2, 2006, Pages 658-663

  Tonisch, K ^a   Cimalla, V ^a   Foerster, Ch ^a   Romanus, H ^a   Ambacher, O ^a   Dontsov, D ^b  

^a ILMENAU UNIVERSITY OF TECHNOLOGY   (Germany)

^b SIOS Messtechnik GmbH   (Germany)

Author keywords

Actuation; Aluminium nitride; Interferometry; MEMS; Piezoresponse; Sputtering

Indexed keywords

ALUMINUM NITRIDE; INTERFEROMETRY; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; POLYCRYSTALLINE MATERIALS; SPUTTERING; THIN FILMS;

ACTUATION; MICROELECTROMECHANICALSYSTEMS (MEMS); PIEZORESPONSE; PIEZORESPONSE FORCE MICROSCOPY;

SEMICONDUCTING FILMS;

EID: 33750837729     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2006.03.001     Document Type: Article

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