A novel design for integrated RF-MEM switches using ferroelectric thin films

Integrated Ferroelectrics

Volumn 76, Issue , 2005, Pages 59-67

  Kugeler C ^a   Tappe, S ^a   Bottger U ^a   Waser, R ^a,b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b IFF   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; FERROELECTRIC THIN FILMS; MICROELECTROMECHANICAL DEVICES; VOLTAGE CONTROL;

CHEMICAL SOLUTION DEPOSITION (CSD); MICROELECTROMECHANICAL SYSTEMS (MEMS); MICROSWITCHES;

ELECTRIC SWITCHES;

EID: 33645510295     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580500413541     Document Type: Conference Paper

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