Fabrication and characterization of high Q microresonators using thin plate mechanical mode

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5343, Issue , 2004, Pages 273-283

  Coudevylle, Jean René ^a   Basrour, Skandar ^b   De Labachelerie, Michel ^a  

^a Lab Phys Metrologie Oscillateurs   (France)

^b TIMA LABORATORY   (France)

Author keywords

Contour mode; DRIE; FEA; Lam mode; Microresonator

Indexed keywords

BOUNDARY CONDITIONS; DIFFERENTIAL EQUATIONS; ELECTRONIC EQUIPMENT; FINITE ELEMENT METHOD; MATHEMATICAL MODELS; MECHANICAL ENGINEERING; OSCILLATORS (ELECTRONIC); POLYSILICON; REACTIVE ION ETCHING; THERMODYNAMIC STABILITY;

CONTOUR MODES; DEEP REACTIVE ION ETCHING (DRIE); LAMÉ MODE; MICRORESONATORS;

RESONATORS;

EID: 2142699723     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.524751     Document Type: Conference Paper

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