Thermo-mechanical evolution of multilayer thin films: Part I. Mechanical behavior of Au/Cr/Si microcantilevers

Thin Solid Films

Volumn 515, Issue 6, 2007, Pages 3208-3223

  Miller, David C ^a   Herrmann, Cari F ^a,b   Maier, Hans J ^c   George, Steven M ^b   Stoldt, Conrad R ^a   Gall, Ken ^d  

^a University of Colorado at Boulder   (United States)

^b UNIVERSITY OF COLORADO   (United States)

^c UNIVERSITY OF PADERBORN   (Germany)

^d Georgia Institute of Technology   (United States)

Author keywords

Curvature evolution; Internal stress evolution; Passivation coating; Thin metal films

Indexed keywords

ANNEALING; CHROMIUM; GOLD; MECHANICAL PROPERTIES; MICROELECTROMECHANICAL DEVICES; MULTILAYERS; PASSIVATION; SILICON; STRESS ANALYSIS;

INTERNAL STRESS EVOLUTION; MICROCANTILEVERS; PASSIVATION COATING; THERMO MECHANICAL RESPONSE; THIN METAL FILMS;

THIN FILMS;

EID: 33846381991     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2006.01.046     Document Type: Article

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