Thin-film micromirror array (TMA) for large information-display systems

Journal of the Society for Information Display

Volumn 8, Issue 2, 2000, Pages 177-181

  Kim, Sang Gook ^{a,b,c,d,e,f,g,h,i}   Hwang, Kyu Ho ^b  

^a MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^b Daewoo Electronics Co   (South Korea)

^c Seoul National University   (South Korea)

^d Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

^e Axiomatics Corp   (United States)

^f Korea Institute of Science and Technology   (South Korea)

^g Dept of Mechanical Engineering ^*  (United States)

^h TMA Res Ctr at Daewoo Electronics   (United States)

ⁱ MEMS Business Division   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

INFORMATION DISPLAY SYSTEM; MOVING MIRROR DISPLAY; REFLECTION DISPLAY; THIN FILM MICROMIRROR ARRAY; THIN FILM PIEZOELECTRIC ACTUATOR;

ACTUATORS; DISPLAY DEVICES; LIGHT MODULATORS; LIGHT TRANSMISSION; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MIRRORS; OPTICAL SYSTEMS; PIEZOELECTRIC DEVICES;

THIN FILM DEVICES;

EID: 0034484410     PISSN: 10710922     EISSN: None     Source Type: Journal    
DOI: 10.1889/1.1828714     Document Type: Article

References (5)

1. L J Hornheck, "Digital light processing™ for high-brightness, high-resolution applications," Proc SPIE 3013, Projection Displays III, 27-40 (1997).
2. S G Kim, K H Hwang, Y J Choi, et al, "Micromachined thin-film mirror array for reflective light modulation," Annals of the CIRP 46, No. 1, 455-458 (1997).
3. K H Hwang, M K Koo, and S G Kim, "High-brightness projection display systems based on the thin-film actuated mirror array (TFAMA)," Proc of SPIE 3513, 171-180 (1998).
4. S G Kim, K H Hwang, J Hwang, et al, "Actuated mirror array - A new chip-based display device for the large screen display," Asia Display '98, 329-334 (199S).
5. K H Hwang, Y J Song, and S G Kim, "Micromachined thin-film actuated mirror array for high brightness projection displays," Jpn J Appl Phys 37, Part 1, No. 12B, 7074-7077 (1998)