Deformable micro-mirror for adaptive optics composed of piezoelectric PZT thin films

IEEE/LEOS Optical MEMS 2005: International Conference on Optical MEMS and Their Applications

Volumn , Issue , 2005, Pages 31-32

  Kotera, Hidetoshi ^a   Kanno, Isaku ^a   Inoue, Takafumi ^a   Suzuki, Takaaki ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ADAPTIVE OPTICS; DIAPHRAGMS; PIEZOELECTRIC DEVICES; THIN FILMS; WAVEFRONTS;

MICROMIRRORS; OPTICAL WAVEFRONT CORRECTION; PIEZOELECTRIC PZT THIN FILMS;

MIRRORS;

EID: 33749065978     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/OMEMS.2005.1540061     Document Type: Conference Paper

References (3)

1. J. A. Perreault, et al., "Adaptive optic correction using microelectromechanical deformable mirrors", Opt. Eng. 41, pp. 561-566, (2002)
2. C. Friese, et al., "Micro-mirror arrays for adaptive optics fabricated in polymer technolog", Proc. Opt. MEMS, pp. 214-215(2004)
3. N. Doble, et al., "Use of a microelectromechanical mirror for adaptive optics in the human eye", Opt. Lett. 27, pp. 1537-1539, (2002)