Optimization of film stresses utilized in composite piezoelectric membrane microgenerators

Materials Research Society Symposium - Proceedings

Volumn 795, Issue , 2003, Pages 503-508

  Kennedy, M S ^a   Zosel, M ^a   Richards, C D ^a   Richards, R F ^a   Bahr, D F ^a   Hipps, K W ^b   Moody, N R ^c  

^a Washington State University   (United States)

^b WASHINGTON STATE UNIVERSITY   (United States)

^c SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTALLIZATION; INDENTATION; MICROACTUATORS; MORPHOLOGY; OPTIMIZATION; POISSON RATIO; POLYETHYLENE GLYCOLS; RAMAN SPECTROSCOPY; RESIDUAL STRESSES; TENSILE STRESS; THIN FILMS; X RAY DIFFRACTION ANALYSIS;

BIAXIAL MODULUS; COMPOSITE MEMBRANES; INTERPLANAR SPACINGS; MICROGENERATORS;

PIEZOELECTRIC DEVICES;

EID: 2442532866     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1557/proc-795-u8.26     Document Type: Conference Paper

References (14)

1. Schwartz, R.W., J.A. Voigt, B.A. Tuttle. J. Mat. Res., 12, p.444 (1997).
2. Masuda, Y., A. Baba. Japanese J, Appl. Phys., 35, p.5002 (1996).
3. Lefevre, M.J., J.S. Speck. J. Mat. Res., 11(8)., p2067 (1996).
4. Maki, K., N. Soyama, S. Mori, K. Ogi. J. Appl. Phys., 39, p.5421 (2000).
5. Tuttle, B.A., T.J. Headley, H.N. Al-Shareef, J.A. Voigt, M. Rodriguez, J. Michael, W.L. Warren. J. Mat. Res., 9, p.2309 (1996).
6. Nam, H.J. Thin Solid Films., 371, p.264 (2000).
7. Bonnotte, E., P. Delobelle, L. Bornier. J. Mater. Res. 12, p.2234 (1997).
8. Shojaei, O.R., A. Karimi, Mat. Res. Symp. Proc., 522, p.245 (1998).
9. Xu, W.-H., D. Lu, T.-Y. Zhang, Appl. Let. Phys., 79(25), p4112 (2001).
10. Bahr, D.F., B.T. Crozier, C.D. Richards, R.F. Richards, Mat. Res. Soc. Symp. Proc., 657, p. 4.4.1 (2001).
11. L.M.R. Eakins, B.W. Olson, C.D. Richards, R.F. Richards, and D.F. Bahr, J. Mater. Res., 18, 2079 (2003).
12. Yu, S., K. Yao, S. Shannigrahi, F.T.E. Hock. J. Mat. Res. 18(3). p. 737 (2003).
13. Hoagland, J.J., J. Dowdy, K.W. Hipps, J. Phys. Chem., 95(6), p2246 (1991).
14. Pharr, G.M., W.C. Oliver. J. Mat. Res., 7, p.1564 (1992).