Property characterization of AlN thin films in composite resonator structure

Journal of Applied Physics

Volumn 101, Issue 8, 2007, Pages

  Chen, Qingming ^a   Qin, Lifen ^a   Wang, Qing Ming ^a  

^a PA 15260   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC BULK WAVE DEVICES; ALUMINUM COMPOUNDS; ELASTIC MODULI; MAGNETRON SPUTTERING; RESONATORS; SCANNING ELECTRON MICROSCOPY; X RAY DIFFRACTION;

COMPOSITE RESONATOR; IMPEDANCE SPECTRUM; LASER INTERFEROMETER; PIEZOELECTRIC COEFFICIENT;

THIN FILMS;

EID: 34247558666     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2716391     Document Type: Conference Paper

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