Micromachined low-loss microwave switches

Journal of Microelectromechanical Systems

Volumn 8, Issue 2, 1999, Pages 129-134

  Yao, Z Jamie ^a   Chen, Shea ^a   Eshelman, Susan ^a   Denniston, David ^a   Goldsmith, Chuck ^a  

^a RAYTHEON COMPANY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC FILMS; ELECTRODES; MEMBRANES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; MICROWAVE CIRCUITS; MICROWAVE DEVICES; MICROWAVES; SWITCHING NETWORKS;

CAPACITIVE SWITCHES; LOW LOSS MICROWAVE SWITCHES; SURFACE MICROMACHINING;

SWITCHES;

EID: 0033149639     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.767108     Document Type: Article

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