Residual stress development in Pb(Zr,Ti)O3/ZrO2/SiO2 stacks for piezoelectric microactuators

Thin Solid Films

Volumn 510, Issue 1-2, 2006, Pages 213-221

  Hong, E ^a   Smith, R ^b   Krishnaswamy, S V ^b   Freidhoff, C B ^b   Trolier McKinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Lead zirconate titanate; Microelectromechanical systems (MEMS); Piezoelectric actuator; Stress measurement; Zirconia

Indexed keywords

ACTUATORS; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; RESIDUAL STRESSES; STRESS ANALYSIS; ZIRCONIA;

LEAD ZIRCONATE TITANATE; MICROELECTROMECHANICAL SYSTEMS (MEMS); PIEZOELECTRIC ACTUATOR;

STACKING FAULTS;

EID: 33646415936     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2005.12.300     Document Type: Article

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