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Volumn 83, Issue 1, 2003, Pages 174-176

Lead-zirconate-titanate-based piezoelectric micromachined switch

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; ELECTRIC POTENTIAL; ELECTRIC SWITCHES; ELECTRODES; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; THIN FILMS;

CANTILEVER ACTUATORS;

PIEZOELECTRIC DEVICES;

EID: 0042842361 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.1589192 Document Type: Article

Times cited : (92)

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