SCOPUS 정보 검색 플랫폼

Materials Research Society Symposium - Proceedings

Volumn 657, Issue , 2001, Pages

Wet-etch patterning of lead zirconate titanate (PZT) thick films for microelectromechanical systems (MEMS) applications

(5) Wang, L P a Wolf, R a Zhou, Q a Trolier McKinstry, S a Davis, R J a

a PENNSYLVANIA STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DIELECTRIC LOSSES; ELECTRON CYCLOTRON RESONANCE; LEAD COMPOUNDS; MICROELECTROMECHANICAL DEVICES; PERMITTIVITY; PHOTOLITHOGRAPHY; PHOTORESISTS; PIEZOELECTRICITY; POLARIZATION; REACTIVE ION ETCHING; REMANENCE; SCANNING ELECTRON MICROSCOPY; SOL-GELS;

ELECTROMECHANICAL COUPLING;

THICK FILMS;

EID: 0035556398 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: None Document Type: Conference Paper

Times cited : (35)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.