Fabrication and sensing behavior of ultrasensitive piezoelectric microcantilever-based precision mass sensor

Journal of the Korean Physical Society

Volumn 49, Issue SUPPL. 2, 2006, Pages

  Shin, Sanghun ^a   Jaichan, Lee ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

Mass sensor; MEMS; Microcantilever; PZT; Resonant frequency

Indexed keywords

EID: 33846349570     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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