Micromachined piezoelectric diaphragms actuated by ring shaped interdigitated transducer electrodes

Sensors and Actuators, A: Physical

Volumn 119, Issue 2, 2005, Pages 521-527

  Hong, Eunki ^a   Krishnaswamy, S V ^b   Freidhoff, C B ^b   Trolier Mckinstry, S ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

^b NORTHROP GRUMMAN CORPORATION   (United States)

Author keywords

Interdigitated transducer electrode; MEMS; Piezoelectric diaphragm; PZT

Indexed keywords

COERCIVE FORCE; ELECTRODES; FINITE ELEMENT METHOD; MICROMACHINING; PIEZOELECTRIC MATERIALS; REMANENCE; RESONANCE; SILICON WAFERS; TRANSDUCERS;

DEFLECTION PROFILES; INTERDIGITATED TRANSDUCER ELECTRODES; LEAD ZIRCONATE TITANATE (PZT); PIEZOELECTRIC DIAPHRAGMS;

ACTUATORS;

EID: 17044417745     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2004.10.019     Document Type: Article

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