MEMS in RF-filter applications: Thin film bulk-acoustic-wave technology

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 1, Issue , 2005, Pages 5-8

  Aigner, Robert ^a  

^a INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

Bulk Acoustic Wave (BAW) Filter; Film Bulk Acoustic Resonator (FBAR); RF MEMS Filter; Solidly Mounted Resonator (SMR)

Indexed keywords

BULK-ACOUSTIC-WAVE (BAW) FILTERS; FILM-BULK-ACOUSTIC-RESONATOR; RF-MEMS FILTER; SOLIDLY MOUNTED RESONATOR;

ACOUSTIC WAVES; ANTENNAS; DIGITAL FILTERS; MOBILE TELECOMMUNICATION SYSTEMS; POWER AMPLIFIERS; RESONATORS; TELEPHONE SETS;

MICROELECTROMECHANICAL DEVICES;

EID: 27544512622     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2005.1496345     Document Type: Conference Paper

References (8)

1. R. Ruby, P. Bradley, J. Larson, Y. Oshmyansyk, D. Figueredo, Ultra-Miniature High-Q Filters and Duplexers using FBAR Technology, IEEE ISSCC2001 conference, Feb. 6, (2001)
2. R. Ruby, A. Barfknecht, C. Han, Y. Desai, F. Geefay, G. Gan, M. Gat, T. Verhoeven, "High-Q FBAR Filters in a Wafer-Level, Chip-Scale Package", IEEE ISSCC 2002 conference, Feb. 2002
3. J.F. Rosenbaum, Bulk Acoustic Wave Theory and Devices, Arctech House, Boston London, 1988
4. K.M. Lakin, G.R. Kline, K.T. McCarron, High-Q Microwave Acoustic Resonators and Filters, IEEE Transactions on Microwave Theory and Techniques, Vol.41, No. 12, Dec. 1993
5. th 2004
6. th, 2002
7. R. Aigner, J. Kaitila, J. Ellä, L. Eibrecht, W. Nessler, M. Handtmann, T.-R. Herzog, S. Marksteiner, " Bulk-Acoustic-Wave Filters: Performance Optimization and Volume Manufacturing", to be presented at IMS-MTTS 2003, Philadelphia June 2003
8. th 2004