{1 0 0}-textured, piezoelectric Pb(Zrx, Ti1-x)O3 thin films for MEMS: Integration, deposition and properties

Sensors and Actuators, A: Physical

Volumn 105, Issue 2, 2003, Pages 162-170

  Ledermann, Nicolas ^a   Muralt, Paul ^a   Baborowski, Jacek ^a   Gentil, Sandrine ^a   Mukati, Kapil ^a   Cantoni, Marco ^a   Seifert, Andreas ^a   Setter, Nava ^a  

^a EPFL   (Switzerland)

Author keywords

MEMS; Piezoelectric thin films; PZT

Indexed keywords

ANNEALING; CERAMIC MATERIALS; COMPOSITION; CRYSTAL GROWTH; CRYSTALLIZATION; ELECTRODEPOSITION; MICROELECTROMECHANICAL DEVICES; NUCLEATION; PIEZOELECTRIC MATERIALS; SEMICONDUCTING SILICON; SOL-GELS; SUBSTRATES;

PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC THIN FILMS;

THIN FILMS;

EID: 0037899581     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0924-4247(03)00090-6     Document Type: Article

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