Pb(Zr,Ti)O3 thin films on zirconium membranes for micromechanical applications

Applied Physics Letters

Volumn , Issue , 1995, Pages 776-

  Maeder, T ^a   Muralt, P ^a   Sagalowicz, L ^a   Reaney, I ^a   Kohli, M ^a   Kholkin, A ^a   Setter, N ^a  

^a EPFL   (Switzerland)

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EID: 36449006814     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.116529     Document Type: Article

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