SCOPUS 정보 검색 플랫폼

Materials Science in Semiconductor Processing

Volumn 7, Issue 3 SPEC. ISS., 2004, Pages 125-141

Copper-related defects in silicon

(1) Knack, S a

a DRESDEN UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

Copper; Defects; Silicon

Indexed keywords

COPPER; FERMI LEVEL; IMPURITIES; NUCLEATION; SUBSTITUTION REACTIONS; SULFUR; THERMAL EFFECTS;

COPPER-RELATED DEFECTS; IMMOBILE TRAPS; METASTABILITIES;

SILICON;

EID: 5044232332 PISSN: 13698001 EISSN: None Source Type: Journal
DOI: 10.1016/j.mssp.2004.06.002 Document Type: Article

Times cited : (26)

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