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Volumn 136-138, Issue , 1998, Pages 744-750

Electron emission channeling with position-sensitive detectors

Author keywords

Emission channeling; Ion implantation; Lattice location; Rare earths; Si

Indexed keywords

CRYSTAL LATTICES; DOSIMETRY; ERBIUM; ION IMPLANTATION; PARTICLE DETECTORS; RADIOACTIVE MATERIALS; SILICON; SINGLE CRYSTALS; THULIUM; YTTERBIUM;

EID: 0032019608     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0168-583X(97)00768-4     Document Type: Article
Times cited : (48)

References (16)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.