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Volumn 136-138, Issue , 1998, Pages 744-750
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Electron emission channeling with position-sensitive detectors
b
CERN
(Switzerland)
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Author keywords
Emission channeling; Ion implantation; Lattice location; Rare earths; Si
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Indexed keywords
CRYSTAL LATTICES;
DOSIMETRY;
ERBIUM;
ION IMPLANTATION;
PARTICLE DETECTORS;
RADIOACTIVE MATERIALS;
SILICON;
SINGLE CRYSTALS;
THULIUM;
YTTERBIUM;
EMISSION CHANNELING;
POSITION SENSITIVE DETECTORS;
ELECTRON EMISSION;
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EID: 0032019608
PISSN: 0168583X
EISSN: None
Source Type: Journal
DOI: 10.1016/S0168-583X(97)00768-4 Document Type: Article |
Times cited : (48)
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References (16)
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