Electrical Properties of Cobalt and Copper Contamination in Processed Silicon

Journal of the Electrochemical Society

Volumn 148, Issue 6, 2001, Pages

  Benton, J L ^a   Boone, T ^a   Jacobson, D C ^a   Silverman, P J ^a   Rosamilia, J M ^a   Rafferty, C S ^a   Weinzierl, Steve ^b   Vu, Bao ^b  

^a LUCENT TECHNOLOGIES   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0242413334     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.1370970     Document Type: Article

References (13)

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