-
1
-
-
5644228379
-
-
and references therein
-
For a general technological approach to defects see recent reviews published in Material Research Society Bulletin, vol.XVI, # 12, Parts I and II, 1991 and references therein.
-
(1991)
Material Research Society Bulletin
, vol.16
, Issue.12 PARTS I AND II
-
-
-
2
-
-
0001649399
-
-
L.C. Kimerling, M.T. Asom, and J.L. Benton, P.J. Drevinsky and C.E. Caefer, Materials Science Forum, 38-41,141 (1989)
-
(1989)
Materials Science Forum
, vol.38-41
, pp. 141
-
-
Kimerling, L.C.1
Asom, M.T.2
Benton, J.L.3
Drevinsky, P.J.4
Caefer, C.E.5
-
3
-
-
5644237450
-
-
M. Levinson, J.L. Benton, and L.C. Kimerling, Phys. Rev., B27, 6217 (1983)
-
(1983)
Phys. Rev.
, vol.B27
, pp. 6217
-
-
Levinson, M.1
Benton, J.L.2
Kimerling, L.C.3
-
4
-
-
0006077113
-
-
M. Levinson, M. Stavola, J.L. Benton, and L.C. Kimerling, Phys. Rev., B28, 5848 (1983)
-
(1983)
Phys. Rev.
, vol.B28
, pp. 5848
-
-
Levinson, M.1
Stavola, M.2
Benton, J.L.3
Kimerling, L.C.4
-
5
-
-
0006109997
-
-
M. Stavola, M. Levinson, J.L. Benton, and L.C. Kimerling, Phys. Rev., B30, 832 (1984)
-
(1984)
Phys. Rev.
, vol.B30
, pp. 832
-
-
Stavola, M.1
Levinson, M.2
Benton, J.L.3
Kimerling, L.C.4
-
10
-
-
0344936892
-
-
A. Mesli, T. Heiser, and N. Amroun, Appl. Phys. Lett., 57, 1898 (1990)
-
(1990)
Appl. Phys. Lett.
, vol.57
, pp. 1898
-
-
Mesli, A.1
Heiser, T.2
Amroun, N.3
-
11
-
-
36549104126
-
-
M.T. Asom, J.L. Benton, R. Sauer, and L.C. Kimerling, Appl. Phys. Lett., 52, 256 (1987)
-
(1987)
Appl. Phys. Lett.
, vol.52
, pp. 256
-
-
Asom, M.T.1
Benton, J.L.2
Sauer, R.3
Kimerling, L.C.4
-
12
-
-
4243207000
-
-
L.W. Song, X.D. Zhan, B.W. Benson, and G.D. Watkins, Phys. Rev. Lett., 60, 460 (1988)
-
(1988)
Phys. Rev. Lett.
, vol.60
, pp. 460
-
-
Song, L.W.1
Zhan, X.D.2
Benson, B.W.3
Watkins, G.D.4
-
15
-
-
36549096467
-
-
T. Ohmi, T. Saito, T. Shibata, and T. Nitta, Appl. Phys. Lett., 52, 2236 (1998)
-
(1998)
Appl. Phys. Lett.
, vol.52
, pp. 2236
-
-
Ohmi, T.1
Saito, T.2
Shibata, T.3
Nitta, T.4
-
16
-
-
0026136197
-
-
T. Ohmi, T. Saito, T. Shibata, and T. Nitta, J. Electrochem. Soc., 138, 1089 (1991)
-
(1991)
J. Electrochem. Soc.
, vol.138
, pp. 1089
-
-
Ohmi, T.1
Saito, T.2
Shibata, T.3
Nitta, T.4
-
18
-
-
5644260978
-
-
and references therein
-
For a recent and complete review on diffusion barrier to silicon, see the Material Research Society Bulletin , vol. XIX, # 8, 1994 and references therein.
-
(1994)
Material Research Society Bulletin
, vol.19
, Issue.8
-
-
-
19
-
-
0005804456
-
-
ed. by H. R. Huff and E. Sirtl Electrochemical Society, Princeton, NJ
-
F.G. Vieweg-Gutberlet and P. F. Siegesleitner, in Semiconductor Silicon 1997, ed. by H. R. Huff and E. Sirtl (Electrochemical Society, Princeton, NJ, 1977), p. 387
-
(1977)
Semiconductor Silicon 1997
, pp. 387
-
-
Vieweg-Gutberlet, F.G.1
Siegesleitner, P.F.2
-
21
-
-
84913065450
-
-
ed. by H. R. Huff,T. Abe and B. Kolbesen Electrochemical Society, Pennington, NJ
-
A. Schnegg, M. Grunder, and H. Jacob, in Semiconductor Silicon 1986, ed. by H. R. Huff,T. Abe and B. Kolbesen (Electrochemical Society, Pennington, NJ, 1986), p. 198
-
(1986)
Semiconductor Silicon 1986
, pp. 198
-
-
Schnegg, A.1
Grunder, M.2
Jacob, H.3
-
22
-
-
0344524439
-
-
ed. by M. Stavola, S.J. Pearton and G. Davies Materials Research Society, Pittsburgh, PA
-
A. Schnegg, H. Prigge, M. Grunder, P.O. Hahn, and H. Jacob, in Defects in Electronic Materials, ed. by M. Stavola, S.J. Pearton and G. Davies (Materials Research Society, Pittsburgh, PA, 1988). Vol. 104, p. 291
-
(1988)
Defects in Electronic Materials
, vol.104
, pp. 291
-
-
Schnegg, A.1
Prigge, H.2
Grunder, M.3
Hahn, P.O.4
Jacob, H.5
-
24
-
-
36549099793
-
-
T. Zundel, J. Weber, and B. Benson, Appl. Phys. Lett., 53, 1426 (1988)
-
(1988)
Appl. Phys. Lett.
, vol.53
, pp. 1426
-
-
Zundel, T.1
Weber, J.2
Benson, B.3
-
25
-
-
5644249017
-
-
Defects in Silicon 1989, ed. by C.A.J. Ammerlaan, A. Chantre and P. Wagner, North-Holland
-
Th. Prescha, T. Zundel, and J. Weber, in Defects in Silicon 1989, ed. by C.A.J. Ammerlaan, A. Chantre and P. Wagner, E-MRS Symposia Proceedings (North-Holland 1989) p.79
-
(1989)
E-MRS Symposia Proceedings
, pp. 79
-
-
Prescha, Th.1
Zundel, T.2
Weber, J.3
-
26
-
-
0000421459
-
-
R. Keller, M. Deicher, W. Pfeiffer, H. Skudlik, M. Steiner, and Th. Wichert. Phys. Rev. Lett., 65, 2023 (1990)
-
(1990)
Phys. Rev. Lett.
, vol.65
, pp. 2023
-
-
Keller, R.1
Deicher, M.2
Pfeiffer, W.3
Skudlik, H.4
Steiner, M.5
Wichert, Th.6
-
29
-
-
0001995888
-
-
A. Mesli, E. Courcelle, T. Zundel, and P. Siffert, Phys. Rev., B36, 8049 (1987)
-
(1987)
Phys. Rev.
, vol.B36
, pp. 8049
-
-
Mesli, A.1
Courcelle, E.2
Zundel, T.3
Siffert, P.4
-
33
-
-
84915543784
-
-
H. Reiss, C.S. Fuller, and F.J. Morin, Bell Syst. Tech. J., 35, 535 (1956)
-
(1956)
Bell Syst. Tech. J.
, vol.35
, pp. 535
-
-
Reiss, H.1
Fuller, C.S.2
Morin, F.J.3
-
36
-
-
36149006515
-
-
M. Lax, Phys. Rev., 119, 1502 (1960)
-
(1960)
Phys. Rev.
, vol.119
, pp. 1502
-
-
Lax, M.1
-
38
-
-
5644281547
-
-
The parenthesis represent the charge states as acquired by the species once into the crystal
-
The parenthesis represent the charge states as acquired by the species once into the crystal.
-
-
-
-
42
-
-
0019703133
-
-
Semiconductors Silicon 1981, ed.by H. R. Huff and R. J. Kriegler The Electrochemical Society, Pennington, New Jersey
-
K. Graff and H. Pieper, in Semiconductors Silicon 1981, Proceedings of the 4th International Symposium on Silicon Material and Technology, ed.by H. R. Huff and R. J. Kriegler (The Electrochemical Society, Pennington, New Jersey, 1981), 81-5, p. 331
-
(1981)
Proceedings of the 4th International Symposium on Silicon Material and Technology
, pp. 81-85
-
-
Graff, K.1
Pieper, H.2
-
43
-
-
0001367431
-
-
J. Weber, H. Bauch, and R. Sauer, Phys. Rev., B25, 7688 (1982)
-
(1982)
Phys. Rev.
, vol.B25
, pp. 7688
-
-
Weber, J.1
Bauch, H.2
Sauer, R.3
-
49
-
-
4243402255
-
-
B. Hamilton, A.R. Peaker, and S.T. Pantelides, Phys. Rev. Lett., 65, 1627 (1988)
-
(1988)
Phys. Rev. Lett.
, vol.65
, pp. 1627
-
-
Hamilton, B.1
Peaker, A.R.2
Pantelides, S.T.3
-
51
-
-
0001376863
-
-
Thermally stimulated relaxation in solids, ed. by Bräunlich, Springer Verlag Berlin
-
D.V. Lang in Thermally stimulated relaxation in solids, Topics in Applied Physics, ed. by Bräunlich, (Springer Verlag Berlin, 1979) p. 93
-
(1979)
Topics in Applied Physics
, pp. 93
-
-
Lang, D.V.1
-
53
-
-
3142782715
-
-
Ed. S. Mahajan and J.W. Corbett, North-Holland Publi. Co, New York
-
J.L. Benton and M. Levinson: in Defects in Semiconductors, Ed. S. Mahajan and J.W. Corbett, (North-Holland Publi. Co, New York, 1983) p. 95
-
(1983)
Defects in Semiconductors
, pp. 95
-
-
Benton, J.L.1
Levinson, M.2
-
54
-
-
36549100269
-
-
S.M. Brotherton, J.R. Ayres, and A. Gill, J. Appl. Phys., 62, 1826 (1987)
-
(1987)
J. Appl. Phys.
, vol.62
, pp. 1826
-
-
Brotherton, S.M.1
Ayres, J.R.2
Gill, A.3
-
55
-
-
0003140644
-
-
L.C. Kimerling, J.L.Benton, and J.J. Rubin, Inst. Phys. Conf. Ser., 59, 217 (1987)
-
(1987)
Inst. Phys. Conf. Ser.
, vol.59
, pp. 217
-
-
Kimerling, L.C.1
Benton, J.L.2
Rubin, J.J.3
-
56
-
-
0040153542
-
-
P. Omling, E.R. Weber, L. Montelius, H.M. Alexander, and J. Michel, Phys. Rev., B32 6571 (1985)
-
(1985)
Phys. Rev.
, vol.B32
, pp. 6571
-
-
Omling, P.1
Weber, E.R.2
Montelius, L.3
Alexander, H.M.4
Michel, J.5
-
58
-
-
5644245818
-
-
A.D. Marwick, M. Wittner, and G.S. Oehrlein, Materials Science Forum, 83-87, 39 (1992)
-
(1992)
Materials Science Forum
, vol.83-87
, pp. 39
-
-
Marwick, A.D.1
Wittner, M.2
Oehrlein, G.S.3
-
59
-
-
5644260976
-
-
Thesis Max Planck Institute of Stuttgart Germany
-
Th. Prescha, Thesis Max Planck Institute of Stuttgart 1990 (Germany)
-
(1990)
-
-
Prescha, Th.1
-
60
-
-
0002635307
-
-
Ed. H.R. Huff, K.G. barraclough, and J. Chikawa
-
P. Wagner, H. Hage, H. Prigge, Th. Prescha, and J. Weber: in Semiconductor Silicon 1990, Ed. H.R. Huff, K.G. barraclough, and J. Chikawa, p. 675
-
(1990)
Semiconductor Silicon
, pp. 675
-
-
Wagner, P.1
Hage, H.2
Prigge, H.3
Prescha, Th.4
Weber, J.5
-
63
-
-
1942523934
-
-
ed. by K. Sumino, Elsevier Science Publishing B.V North-Holland
-
R. Keller, M. Deicher, W. Pfeiffer, H. Skudlik, D. Steiner, and Th. Wichert: in the proceeding of Defect Control in Semiconductors, ed. by K. Sumino, Elsevier Science Publishing B.V (North-Holland, 1990) p. 377
-
(1990)
The Proceeding of Defect Control in Semiconductors
, pp. 377
-
-
Keller, R.1
Deicher, M.2
Pfeiffer, W.3
Skudlik, H.4
Steiner, D.5
Wichert, Th.6
-
65
-
-
5644296800
-
-
M. Deicher, G. Grubel, R. Keller, E. Reckmagel, N. Schultz. H. Skudlik, Th. Wichert, H. Prigge, and A. Schnegg, Phys. Conf. Ser., 95, 155 (1989)
-
(1989)
Phys. Conf. Ser.
, vol.95
, pp. 155
-
-
Deicher, M.1
Grubel, G.2
Keller, R.3
Reckmagel, E.4
Schultz, N.5
Skudlik, H.6
Wichert, Th.7
Prigge, H.8
Schnegg, A.9
-
66
-
-
0026157996
-
-
H. Prigge, P. Gerlach, P.O. Hahn, A. Schnegg, and H. Jacob, J. Electrochem. Soc., 138, 1385 (1991)
-
(1991)
J. Electrochem. Soc.
, vol.138
, pp. 1385
-
-
Prigge, H.1
Gerlach, P.2
Hahn, P.O.3
Schnegg, A.4
Jacob, H.5
-
67
-
-
0344107939
-
-
J. Hage, H. Prigge, and P. Wagner, Appl. Phys., A50, 241 (1990)
-
(1990)
Appl. Phys.
, vol.A50
, pp. 241
-
-
Hage, J.1
Prigge, H.2
Wagner, P.3
-
70
-
-
0347272948
-
-
Th. Wichert, R. Keller, M. Deicher, W. Pfeiffer, H. Skudlik, and D. Steiner, Mat. Res. Soc. Symp. Proc., vol 163, (1990) p. 245
-
(1990)
Mat. Res. Soc. Symp. Proc.
, vol.163
, pp. 245
-
-
Wichert, Th.1
Keller, R.2
Deicher, M.3
Pfeiffer, W.4
Skudlik, H.5
Steiner, D.6
-
79
-
-
5644286262
-
-
A. Zamouche, T. Heiser, and A. Mesli, Appl. Phys. Lett., 66, 5 (1995)
-
(1995)
Appl. Phys. Lett.
, vol.66
, pp. 5
-
-
Zamouche, A.1
Heiser, T.2
Mesli, A.3
-
84
-
-
0001745555
-
-
D.E. Woon, D.S. Marynick, and S.K. Estreicher, Phys. Rev., B45, 13383 (1992)
-
(1992)
Phys. Rev.
, vol.B45
, pp. 13383
-
-
Woon, D.E.1
Marynick, D.S.2
Estreicher, S.K.3
-
90
-
-
5644231754
-
-
In Ref. [39] we wrote for the Thomson capture radius 500 nm. The reader should of course read 500Å.
-
In Ref. [39] we wrote for the Thomson capture radius 500 nm. The reader should of course read 500Å.
-
-
-
-
93
-
-
11944266974
-
-
S.M. Myers, M.I. Baskes, H.K. Birnbaum, J.W. Corbett, G.G. DeLeo, S.K. Estreicher, E.E. Haller, P. Jena, N.M.Johnson, R. Kirchheim, S.J. Pearton, and M.J. Stavola, Rev. Mod. Phys., 64,559 (1992)
-
(1992)
Rev. Mod. Phys.
, vol.64
, pp. 559
-
-
Myers, S.M.1
Baskes, M.I.2
Birnbaum, H.K.3
Corbett, J.W.4
DeLeo, G.G.5
Estreicher, S.K.6
Haller, E.E.7
Jena, P.8
Johnson, N.M.9
Kirchheim, R.10
Pearton, S.J.11
Stavola, M.J.12
-
100
-
-
0016060451
-
-
G. Celotti, D. Nobili, and P. Ostoja, J. Mat. Sci., 9, 821 (1974)
-
(1974)
J. Mat. Sci.
, vol.9
, pp. 821
-
-
Celotti, G.1
Nobili, D.2
Ostoja, P.3
-
101
-
-
0021627842
-
-
H.J. Herzog, L. Csepregi, and H. Seidel, J. Electrochem. Soc., 131, 2969 (1984)
-
(1984)
J. Electrochem. Soc.
, vol.131
, pp. 2969
-
-
Herzog, H.J.1
Csepregi, L.2
Seidel, H.3
-
106
-
-
5644269981
-
-
H. Nakashima, T. Sadoh, and T. Tsurushima, Materials Science Forum, 143-147, 1991 (1994)
-
(1994)
Materials Science Forum
, vol.143-147
, pp. 1991
-
-
Nakashima, H.1
Sadoh, T.2
Tsurushima, T.3
|