Location-dependent frequency tuning of vibrating micromechanical resonators via laser trimming

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2005, Pages 272-279

  Abdelmoneum, Mohamed A ^a   Demirci, Mustafa M ^a   Lin, Yu Wei ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Fabrication tolerance; Frequency; Laser trimming; Micro mechanical resonator; RF MEMS

Indexed keywords

LASER BEAMS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

FABRICATION TOLERANCE; FREQUENCY; LASER TRIMMING; MICRO-MECHANICAL RESONATORS; RF MEMS;

CAVITY RESONATORS;

EID: 28744436916     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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