Mechanically corner-coupled square microresonator array for reduced series motional resistance

Journal of Microelectromechanical Systems

Volumn 15, Issue 6, 2006, Pages 1419-1436

  Demirci, Mustafa U ^a,b   Nguyen, Clark T C ^a,c  

^a UNIVERSITY OF MICHIGAN   (United States)

^b TOYOTA TECHNICAL CENTER   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Array; Impedance; Mechanical coupling; Micromechanical resonator; Motional resistance; Quality factor; Radio frequency (RF) microelectromechanical systems (MEMS); Resonator; Square plate

Indexed keywords

ARRAYS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; NATURAL FREQUENCIES; VIBRATIONS (MECHANICAL);

MECHANICAL COUPLING; MICRORESONATOR ARRAY; MOTIONAL RESISTANCE;

RESONATORS;

EID: 33845536576     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2006.883588     Document Type: Article

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