Stemless wine-glass-mode disk micromechanical resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2003, Pages 698-701

  Abdelmoneum, Mohamed A ^a   Demirci, Mustafa U ^a   Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; FINITE ELEMENT METHOD; NATURAL FREQUENCIES; POLYSILICON; PRESSURE EFFECTS; RESONATORS;

MICROMECHANICAL RESONATOR; STEMLESS SUSPENSION STRUCTURE; VACUUM PRESSURE; VIBRATING DISK RESONATOR DESIGN; WINE-GLASS MODE RESONATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 0038493939     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

1. C. T.-C. Nguyen, "Vibrating RF MEMS for Low Power Communications," to be published in the Proceedings of the 2002 Fall MRS Meeting, Boston, MA, Dec. 2-6.
2. C. T.-C. Nguyen, Dig. of Papers, Topical Mtg on Silicon Monolithic IC's in RF Systems, Sept. 12-14 2001, pp. 23-32.
3. J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, Technical Digest, IEEE Int. Electron Devices Meeting, San Francisco, California, Dec. 11-13, 2000, pp. 399-402.
4. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
5. M. Onoe, "Contour vibrations of isotropic circular plates", J. of Acoustical Society of America, vol. 28, no.6, pp. 1158-11662, Nov. 1954.
6. W.-T. Hsu, J. R. Clark, and C. T.-C. Nguyen, Technical Digest, 14th Int. IEEE MEMS Conference, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 349-352.