UHF Micromechanical Extensional Wine-Glass Mode Ring Resonators

Technical Digest - International Electron Devices Meeting

Volumn , Issue , 2003, Pages 953-956

  Xie, Yuan ^a   Li, Sheng Shian ^a   Lin, Yu Wei ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC IMPEDANCE; ELECTRODES; MATHEMATICAL MODELS; OSCILLATORS (ELECTRONIC); POLYSILICON; SUBSTRATES; TRANSCEIVERS; VIBRATIONS (MECHANICAL);

MICROMECHANICAL RING RESONATORS; WIRELESS COMMUNICATORS;

RESONATORS;

EID: 0842288131     PISSN: 01631918     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

1. J. Wang, Z. Ren, and C. T.-C. Nguyen, "Self-aligned 1.14-GHz vibrating radial-mode disk resonators," Transducers'03, pp. 947-950.
2. J. R. Clark, W.-T. Hsu, and C. T.-C. Nguyen, "High-Q VHF μmechanical contour-mode disk resonators," IEDM'00, pp. 399-402.
3. M. A. Abdelmoneum, M. U. Demirci, and C. T.-C. Nguyen, "Stemless wine-glass-mode disk μmech. resonators," MEMS'03, pp. 698-701.
4. B. Bircumshaw, G. Liu, H. Takeuchi, T.-J. King, R. Howe, O. O'Reilly A. Pisano, "The radial bulk annular resonator: towards a 50ω RF MEMS filter," Transducers'03, pp. 875-879.
5. G. Ambati, J. F. W. Bell, and J. C. K. Sharp, "In-plane vibrations of annular rings," Journal of Sound and Vibration, Vol. 47, no. 3, pp. 415-432, 1976.
6. R. A. Johnson, Mechanical Filters in Electronics. New York, NY: Wiley, 1983.
7. F. D. Bannon III, J. R. Clark, C. T.-C. Nguyen, "High-Q HF microelectromechanical Filters," IEEE J. Solid-State Circuits, Vol. 35, no. 4, pp. 512-526, Apr. 2000.