Frequency stability of wafer-scale encapsulated MEMS resonators

Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05

Volumn 2, Issue , 2005, Pages 1965-1968

  Kim, Bongsang ^a   Candler, Rob N ^a   Hopcroft, Matthew ^a   Agarwal, Manu ^a   Park, Woo Tae ^a   Kenny, Thomas W ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Encapsulation; Hysteresis; Long term stability; MEMS resonator; Resonant frequency stability

Indexed keywords

ENCAPSULATION; FREQUENCY STABILITY; HYSTERESIS; MICROELECTROMECHANICAL DEVICES; SILICON WAFERS; TEMPERATURE CONTROL; WSI CIRCUITS;

ENCAPSULATED RESONATORS; LONG-TERM STABILITY; MEMS RESONATORS; RESONANT FREQUENCY STABILITY;

OPTICAL RESONATORS;

EID: 27544437585     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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