Third-order intermodulation distortion in capacitively-driven VHF micromechanical resonators

Proceedings - IEEE Ultrasonics Symposium

Volumn 3, Issue , 2005, Pages 1592-1595

  Lin, Yu Wei ^a   Li, Sheng Shian ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Filters; Interference; Intermodulation distortion; Microelectromechanical devices; Microresonators

Indexed keywords

DISTORTION (WAVES); INTERMODULATION; MICROELECTROMECHANICAL DEVICES; WAVE FILTERS; WAVE INTERFERENCE;

INTERMODULATION DISTORTION; MICROMECHANICAL RESONATORS; MICRORESONATORS;

RESONATORS;

EID: 33847172737     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2005.1603165     Document Type: Conference Paper

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