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Volumn 5716, Issue , 2005, Pages

Vibrating RF MEMS overview: Applications to wireless communications

Author keywords

Communications; Filter; Oscillator; Quality factor; Radio frequency; Resonator

Indexed keywords

COMMUNICATIONS; FILTERS; OSCILLATORS; QUALITY FACTOR; RADIO FREQUENCY; POWER SAVINGS; QUALITY FACTORS; WIRELESS TRANSCEIVERS;

EID: 21844462547     PISSN: 16057422     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.608015     Document Type: Conference Paper
Times cited : (17)

References (42)
  • 1
    • 0029508874 scopus 로고
    • Direct-conversion radio transceivers for digital comms
    • Dec.
    • A. A. Abidi, "Direct-conversion radio transceivers for digital comms," IEEE J. Solid-State Circuits, vol. 30, No. 12, pp. 1399-1410, Dec. 1995.
    • (1995) IEEE J. Solid-state Circuits , vol.30 , Issue.12 , pp. 1399-1410
    • Abidi, A.A.1
  • 2
    • 0032075292 scopus 로고    scopus 로고
    • On-chip spiral inductors with patterned ground shields for Si-based RF IC's
    • May
    • C.P. Yue and S.S. Wong, "On-chip spiral inductors with patterned ground shields for Si-based RF IC's," IEEE J. Solid-State Circuits, vol. 33, no. 5, pp.743-752, May 1998.
    • (1998) IEEE J. Solid-state Circuits , vol.33 , Issue.5 , pp. 743-752
    • Yue, C.P.1    Wong, S.S.2
  • 3
    • 3042742341 scopus 로고    scopus 로고
    • 1.51-GHz polydiamond μmechanical disk resonator with impedance-mismatched isolating support
    • Maastricht, The Netherlands, Jan. 25-29
    • J. Wang, J. E. Butler, T. Feygelson, and C. T.-C. Nguyen, "1.51-GHz polydiamond μmechanical disk resonator with impedance-mismatched isolating support," Proceedings, IEEE Int. MEMS Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 641-644.
    • (2004) Proceedings, IEEE Int. MEMS Conf. , pp. 641-644
    • Wang, J.1    Butler, J.E.2    Feygelson, T.3    Nguyen, C.T.-C.4
  • 5
    • 0038749746 scopus 로고    scopus 로고
    • Transceiver front-end architectures using vibrating micromechanical signal processors
    • Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Sept. 12-14
    • C. T.-C. Nguyen, "Transceiver front-end architectures using vibrating micromechanical signal processors (invited)," Dig. of Papers, Topical Meeting on Silicon Monolithic Integrated Circuits in RF Systems, Sept. 12-14, 2001, pp. 23-32.
    • (2001) Dig. of Papers , pp. 23-32
    • Nguyen, C.T.-C.1
  • 6
    • 0042526391 scopus 로고    scopus 로고
    • Transceiver front-end architectures using vibrating micromechanical signal processors
    • chapter in edited by G. I. Haddad, T. Itoh, and J. Harvey New York: Wiley IEEE-Press
    • C. T.-C. Nguyen, "Transceiver front-end architectures using vibrating micromechanical signal processors," chapter in RF Technologies for Low Power Wireless Communications, edited by G. I. Haddad, T. Itoh, and J. Harvey, pp. 411-461. New York: Wiley IEEE-Press, 2001.
    • (2001) RF Technologies for Low Power Wireless Communications , pp. 411-461
    • Nguyen, C.T.-C.1
  • 7
    • 0033115191 scopus 로고    scopus 로고
    • An integrated CMOS micromechanical resonator high-Q oscillator
    • April
    • C. T.-C. Nguyen and R. T. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999.
    • (1999) IEEE J. Solid-state Circuits , vol.34 , Issue.4 , pp. 440-455
    • Nguyen, C.T.-C.1    Howe, R.T.2
  • 8
    • 0002939906 scopus 로고
    • Fabrication technology for an integrated surface-micromachined sensor
    • Oct.
    • T. A. Core, W. K. Tsang, and S. J. Sherman, "Fabrication technology for an integrated surface-micromachined sensor," Solid State Technology, pp. 39-47, Oct. 1993.
    • (1993) Solid State Technology , pp. 39-47
    • Core, T.A.1    Tsang, W.K.2    Sherman, S.J.3
  • 10
    • 3042709857 scopus 로고    scopus 로고
    • High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates
    • Maastricht, The Netherlands, Jan. 25-29
    • J. Caspar, V. Chu, and J. P. Conde, "High-Q thin-film silicon resonators processed at temperatures below 110°C on glass and plastic substrates," Proceedings, 17th Int. IEEE MEMS Conf., Maastricht, The Netherlands, Jan. 25-29, 2004, pp. 633-636.
    • (2004) Proceedings, 17th Int. IEEE MEMS Conf. , pp. 633-636
    • Caspar, J.1    Chu, V.2    Conde, J.P.3
  • 11
    • 0034269559 scopus 로고    scopus 로고
    • VHF free-free beam high-Q micromechanical resonators
    • Sept.
    • K. Wang, A.-C. Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," IEEE/ASME J. Micro-electromech. Syst., vol. 9, no. 3, pp. 347-360, Sept. 2000.
    • (2000) IEEE/ASME J. Micro-electromech. Syst. , vol.9 , Issue.3 , pp. 347-360
    • Wang, K.1    Wong, A.-C.2    Nguyen, C.T.-C.3
  • 13
  • 14
    • 0033352716 scopus 로고    scopus 로고
    • Noise in microelectromechanical system resonators
    • Nov.
    • J. R. Vig and Y. Kim, "Noise in microelectromechanical system resonators," IEEE Trans. Utrason. Ferroelec. Freq. Contr., vol. 46, no. 6, pp. 1558-1565, Nov. 1999.
    • (1999) IEEE Trans. Utrason. Ferroelec. Freq. Contr. , vol.46 , Issue.6 , pp. 1558-1565
    • Vig, J.R.1    Kim, Y.2
  • 15
    • 78649248034 scopus 로고    scopus 로고
    • Self-aligned 1.14-GHz vibrating radial-mode disk resonators
    • Transducers'03, Boston, Massachusetts, June 8-12
    • J. Wang, Z. Ren, and C. T.-C. Nguyen, "Self-aligned 1.14-GHz vibrating radial-mode disk resonators," Dig. of Tech. Papers, Transducers'03, Boston, Massachusetts, June 8-12, 2003, pp. 947-950.
    • (2003) Dig. of Tech. Papers , pp. 947-950
    • Wang, J.1    Ren, Z.2    Nguyen, C.T.-C.3
  • 17
    • 0842288131 scopus 로고    scopus 로고
    • UHF micromechanical extensional wine-glass mode ring resonators
    • 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10
    • Y. Xie, S.-S. Li, Y.-W. Lin, Z. Ren, and C. T.-C. Nguyen, "UHF Micromechanical Extensional Wine-Glass Mode Ring Resonators," Technical Digest, 2003 IEEE International Electron Devices Meeting, Washington, DC, Dec. 8-10, 2003, pp. 953-956.
    • (2003) Technical Digest , pp. 953-956
    • Xie, Y.1    Li, S.-S.2    Lin, Y.-W.3    Ren, Z.4    Nguyen, C.T.-C.5
  • 21
    • 0033338623 scopus 로고    scopus 로고
    • High-order medium frequency micromechanical electronic filters
    • Dec.
    • K. Wang and C. T.-C. Nguyen, "High-order medium frequency micromechanical electronic filters," IEEE/ASME J. Microelectromech. Syst., vol. 8, no. 4, pp. 534-557, Dec. 1999.
    • (1999) IEEE/ASME J. Microelectromech. Syst. , vol.8 , Issue.4 , pp. 534-557
    • Wang, K.1    Nguyen, C.T.-C.2
  • 23
    • 0036122670 scopus 로고    scopus 로고
    • Stiffness-compensated temperature-insensitive micromechanical resonators
    • 2002 IEEE Int. MEMS Conf., Las Vegas, Nevada, Jan. 20-24
    • W. -T. Hsu and C. T. -C. Nguyen, "Stiffness-compensated temperature-insensitive micromechanical resonators," Tech. Digest, 2002 IEEE Int. MEMS Conf., Las Vegas, Nevada, Jan. 20-24, 2002, pp. 731-734.
    • (2002) Tech. Digest , pp. 731-734
    • Hsu, W.T.1    Nguyen, C.T.C.2
  • 24
    • 84938174380 scopus 로고
    • A simple model of feedback oscillator noise spectrum
    • Feb.
    • D. B. Leeson, "A simple model of feedback oscillator noise spectrum," Proc. IEEE, vol. 54, pp. 329-330, Feb. 1966.
    • (1966) Proc. IEEE , vol.54 , pp. 329-330
    • Leeson, D.B.1
  • 26
    • 84944736636 scopus 로고    scopus 로고
    • SOI-based HF and VHF single-crystal Si resonators with sub-100 nm vertical capacitive gaps
    • Transducers'03, Boston, Massachusetts, June 8-12
    • S. Pourkamali and F. Ayazi, "SOI-based HF and VHF single-crystal Si resonators with sub-100 nm vertical capacitive gaps, Dig. of Tech. Papers, Transducers'03, Boston, Massachusetts, June 8-12, 2003, pp. 837-840.
    • (2003) Dig. of Tech. Papers , pp. 837-840
    • Pourkamali, S.1    Ayazi, F.2
  • 27
    • 0842331259 scopus 로고    scopus 로고
    • Series-resonant micromechanical resonator oscillator
    • 2003 IEEE Int. Electron Devices Mtg, Washington, DC, Dec. 8-10
    • Y.-W. Lin, S. Lee, Z. Ren, and C. T.-C. Nguyen, "Series-resonant micromechanical resonator oscillator," Tech. Digest, 2003 IEEE Int. Electron Devices Mtg, Washington, DC, Dec. 8-10, 2003, pp. 961-964.
    • (2003) Tech. Digest , pp. 961-964
    • Lin, Y.-W.1    Lee, S.2    Ren, Z.3    Nguyen, C.T.-C.4
  • 28
    • 2442693902 scopus 로고    scopus 로고
    • 60-MHz wine glass micromechanical disk reference oscillator
    • 2004 IEEE hit. Solid-State Circuits Conf., San Francisco, California, Feb. 15-19
    • Y.-W. Lin, S. Lee, S.-S. Li, Y. Xie, Z. Ren, and C. T.-C. Nguyen, "60-MHz wine glass micromechanical disk reference oscillator," Dig. of Tech. Papers, 2004 IEEE hit. Solid-State Circuits Conf., San Francisco, California, Feb. 15-19, 2004, pp. 322-323.
    • (2004) Dig. of Tech. Papers , pp. 322-323
    • Lin, Y.-W.1    Lee, S.2    Li, S.-S.3    Xie, Y.4    Ren, Z.5    Nguyen, C.T.-C.6
  • 29
    • 1542335823 scopus 로고    scopus 로고
    • Influence of automatic level control on μmechanical resonator oscillator phase noise
    • Tampa, Florida, May 5-8
    • S. Lee and C. T.-C. Nguyen, "Influence of automatic level control on μmechanical resonator oscillator phase noise," Proceedings, 2003 IEEE Int. Freq. Control Symp, Tampa, Florida, May 5-8, 2003, pp. 341-349.
    • (2003) Proceedings, 2003 IEEE Int. Freq. Control Symp , pp. 341-349
    • Lee, S.1    Nguyen, C.T.-C.2
  • 30
    • 1542709513 scopus 로고    scopus 로고
    • Micromechanical mixer-filters ("mixlers")
    • Feb.
    • A.-C. Wong and C. T.-C. Nguyen, "Micromechanical mixer-filters ("mixlers")," IEEE/ASME J. Microelectromech. Syst., vol. 13, no. 1, pp. 100-112, Feb. 2004.
    • (2004) IEEE/ASME J. Microelectromech. Syst. , vol.13 , Issue.1 , pp. 100-112
    • Wong, A.-C.1    Nguyen, C.T.-C.2
  • 31
    • 0141947275 scopus 로고    scopus 로고
    • Recommended minimum performance standards for dual-mode wideband spread spectrum cellular mobile stations
    • July
    • "Recommended minimum performance standards for dual-mode wideband spread spectrum cellular mobile stations," TIA/EIA/IS-98-A Interim Standard, July 1996.
    • (1996) TIA/EIA/IS-98-A Interim Standard
  • 32
    • 0002500439 scopus 로고    scopus 로고
    • RF system issues related to COM a receiver specifications
    • Sept.
    • W. Y. Ali-Ahmad, "RF system issues related to COM A receiver specifications," RF Design, pp. 22-32, Sept. 1999.
    • (1999) RF Design , pp. 22-32
    • Ali-Ahmad, W.Y.1
  • 33
    • 0031147079 scopus 로고    scopus 로고
    • A 1.5-V, 1.5-GHz CMOS low noise amplifier
    • May
    • D. K. Shaeffer and T. H. Lee, "A 1.5-V, 1.5-GHz CMOS low noise amplifier," IEEE J. Solid-State Circuits, vol. 32, No. 5, pp. 745-759, May 1997.
    • (1997) IEEE J. Solid-state Circuits , vol.32 , Issue.5 , pp. 745-759
    • Shaeffer, D.K.1    Lee, T.H.2
  • 34
    • 0031146007 scopus 로고    scopus 로고
    • A 1.8-GHz low-phase noise CMOS VCO using optimized hollow spiral inductors
    • May
    • J. Craninckx and M. S. J. Steyaert, "A 1.8-GHz low-phase noise CMOS VCO using optimized hollow spiral inductors," IEEE J. Solid-State Circuits, vol. 32, no. 5, pp. 736-744, May 1997.
    • (1997) IEEE J. Solid-state Circuits , vol.32 , Issue.5 , pp. 736-744
    • Craninckx, J.1    Steyaert, M.S.J.2
  • 35
    • 0032027371 scopus 로고    scopus 로고
    • A 1.6-GHz CMOS PLL with on-chip loop filter
    • March
    • J. F. Parker and D. Ray, "A 1.6-GHz CMOS PLL with on-chip loop filter," IEEE J. Solid-State Circuits, vol. 33, no. 3, pp. 337-343, March 1998.
    • (1998) IEEE J. Solid-state Circuits , vol.33 , Issue.3 , pp. 337-343
    • Parker, J.F.1    Ray, D.2
  • 36
    • 21844451751 scopus 로고    scopus 로고
    • Personal communications with Discera, Inc.
    • Personal communications with Discera, Inc.
  • 37
    • 0032637099 scopus 로고    scopus 로고
    • Frequency-selective MEMS for miniaturized low-power communication devices
    • Aug.
    • C. T.-C. Nguyen, "Frequency-selective MEMS for miniaturized low-power communication devices (invited)," IEEE Trans. Microwave Theory Tech., vol. 47, no. 8, pp. 1486-1503, Aug. 1999.
    • (1999) IEEE Trans. Microwave Theory Tech. , vol.47 , Issue.8 , pp. 1486-1503
    • Nguyen, C.T.-C.1
  • 38
    • 0034999164 scopus 로고    scopus 로고
    • Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators
    • 14th Int. IEEE MEMS Conf, Interlaken, Switzerland, Jan. 21-25
    • R. Navid, J. R. Clark, M. Demirci, and C. T.-C. Nguyen, "Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators," Tech. Digest, 14th Int. IEEE MEMS Conf, Interlaken, Switzerland, Jan. 21-25, 2001, pp. 228-231.
    • (2001) Tech. Digest , pp. 228-231
    • Navid, R.1    Clark, J.R.2    Demirci, M.3    Nguyen, C.T.-C.4
  • 39
    • 17044424049 scopus 로고    scopus 로고
    • Dry-release post-CMOS compatible contour-mode AlN μechanical resonators for VHF applications
    • 2004 Solid-State Sensor, Actuator, and Microsystems Wkshop, Hilton Head Island, SC, June 6-10
    • G. Piazza, and A. P. Pisano, "Dry-release post-CMOS compatible contour-mode AlN μechanical resonators for VHF applications," Tech. Digest, 2004 Solid-State Sensor, Actuator, and Microsystems Wkshop, Hilton Head Island, SC, June 6-10, pp. 37-40.
    • Tech. Digest , pp. 37-40
    • Piazza, G.1    Pisano, A.P.2
  • 40
    • 26844443354 scopus 로고    scopus 로고
    • A new MEMS-based quartz resonator technology
    • 2004 Solid-State Sensor, Actuator, and Microsystems Wkshop, Hilton Head Island, SC, June 6-10
    • D. T. Chang, F. P. Stratton, D. J. Kirby, R. J. Joyce, T.-Y. Hsu, and R. L. Kubena, "A new MEMS-based quartz resonator technology," Tech. Digest, 2004 Solid-State Sensor, Actuator, and Microsystems Wkshop, Hilton Head Island, SC, June 6-10, pp. 41-44.
    • Tech. Digest , pp. 41-44
    • Chang, D.T.1    Stratton, F.P.2    Kirby, D.J.3    Joyce, R.J.4    Hsu, T.-Y.5    Kubena, R.L.6
  • 41
    • 84944728516 scopus 로고    scopus 로고
    • Mechanically corner-coupled square microresonator array for reduced series motional resistance
    • Transducers'03, Boston, Massachusetts, June 8-12
    • M. U. Demirci, M. A. Abdelmoneum, and C. T.-C. Nguyen, "Mechanically corner-coupled square microresonator array for reduced series motional resistance," Dig. of Tech. Papers, Transducers'03, Boston, Massachusetts, June 8-12, 2003, pp. 955-958.
    • (2003) Dig. of Tech. Papers , pp. 955-958
    • Demirci, M.U.1    Abdelmoneum, M.A.2    Nguyen, C.T.-C.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.