Third-order intermodulation distortion in capacitively-driven CC-beam micromechanical resonators

Proceedings of the IEEE Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2001, Pages 228-231

  Navid, Reza ^a   Clark, John R ^a   Demirci, Mustafa ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CODE DIVISION MULTIPLE ACCESS; COMPOSITE MICROMECHANICS; ELECTRIC DISTORTION; ELECTRIC POTENTIAL; GLOBAL SYSTEM FOR MOBILE COMMUNICATIONS; INTERMODULATION; RESONANCE;

MICROMECHANICAL RESONATORS;

RESONATORS;

EID: 0034999164     PISSN: 10846999     EISSN: None     Source Type: Journal    
DOI: 10.1109/MEMSYS.2001.906520     Document Type: Article

References (0)