Disk-array design for suppression of unwanted modes in mlcromechanical composite-array filters

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 866-869

  Li, Sheng Shian ^a   Lin, Yu Wei ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; CAPACITANCE; CIRCUIT THEORY; OSCILLATORS (ELECTRONIC); RESONANT CIRCUITS; TRANSDUCERS;

CAPACITIVE TRANSDUCERS; CIRCUIT STRUCTURE; RESONANT MODE; RESONATOR ARRAYING;

COMPOSITE MICROMECHANICS;

EID: 33750114574     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)

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