Influence of automatic level control on micromechanical resonator oscillator phase noise

Proceedings of the Annual IEEE International Frequency Control Symposium

Volumn , Issue , 2003, Pages 341-349

  Lee, Seungbae ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Automatic level control; MEMS; Nonlinear; Oscillator; Phase noise; Resonator

Indexed keywords

AMPLIFIERS (ELECTRONIC); ELECTRIC NETWORK TOPOLOGY; ELECTRIC POTENTIAL; GAIN CONTROL; NONLINEAR CONTROL SYSTEMS; OSCILLATORS (ELECTRONIC); PIEZOELECTRIC TRANSDUCERS; Q FACTOR MEASUREMENT; RESONATORS;

AUTOMATIC LEVEL CONTROL (ALC); PHASE NOISE;

MICROELECTROMECHANICAL DEVICES;

EID: 1542335823     PISSN: 01616404     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (15)

1. C. T.-C. Nguyen and R. T. Howe, "An integrated CMOS micromechanical resonator high-Q oscillator," IEEE J. Solid-State Circuits, vol. 34, no. 4, pp. 440-455, April 1999.
2. T. A. Core, W. K. Tsang, S. J. Sherman, "Fabrication technology for an integrated surface-micromachined sensor," Solid State Technology, pp. 39-47, Oct. 1993.
3. th Int. IEEE MEMS Conf., Orlando, Florida, Jan. 17-21, 1999, pp. 630-637.
4. A.-C. Wong, Y. Xie, and C. T.-C. Nguyen, "A bonded-micro-platform technology for modular merging of RF MEMS and transistor circuits," Dig. of Tech. Papers, Transducers'01, Munich, Germany, June 10-14, 2001, pp. 992-995.
5. T. Mattila, J. Kiihamaki, T. Lamminmaki, O. Jaakkoka, P. Rantakari, A. Oja, H. Seppa, H. Kattelus and I. Tittonen, "A 12 MHz micromechanical bulk acoustic mode oscillator," Sensors and Actuators, A 101, pp. 1-9, 2002
6. W. -T. Hsu and C. T. -C. Nguyen, "Stiffness-compensated temperature-insensitive micromechanical resonators," Tech. Digest, 2002 IEEE Int. Micro Electro Mechanical Systems Conf., Las Vegas, Nevada, Jan. 20-24, 2002, pp. 731-734.
7. th Int. Conf. on Solid-State Sensors & Actuators (Transducers'01), Munich, Germany, June 10-14, 2001, pp. 1094-1097.
8. th ed. New York: Wiley, 1990.
9. F. D. Bannon III, J. R. Clark, and C. T.-C. Nguyen, "High frequency micromechanical filters," IEEE J. Solid-State Circuits, vol. 35, no. 4, pp. 512-526, April 2000.
10. H. Nathanson, W. E. Newell, R. A. Wickstrom, and J. R. Davis, Jr., "The resonant gate transistor," IEEE Trans. Electron Devices, vol. ED-14, No. 3, pp. 117-133, March 1967.
11. R. J. Matthys, Crystal Oscillator Circuits. New York: Wiley, 1983.
12. D. B. Leeson, "A simple model of feedback oscillator noise spectrum," Proc. IEEE, vol. 54, pp. 329-330, Feb. 1966.
13. A. H. Nayfeh and D. T. Mook, Nonlinear Oscillations. New York: Wiley, 1979.
14. K. Wang, A.-C. Wong, and C. T.-C. Nguyen, "VHF free-free beam high-Q micromechanical resonators," IEEE/ASME J. Microelectromech. Syst.,vol. 9, no. 3, pp. 347-360, Sept. 2000.
15. C. T.-C. Nguyen, "Micromechanical Signal Processors," Ph.D. Dissertation, Dept. of EECS, University of California at Berkeley, Dec. 1994.