The radial bulk annular resonator: Towards a 50Ω RF MEMS filter

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 875-878

  Bircumshaw, B ^a,c   Liu, G ^b   Takeuchi, H ^b   Tsu Jae King, ^b   Howe, R ^a,b,c   O'Reilly, O ^a   Pisano, A ^a,b,c  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

Electrostatics; Fabrication; Film bulk acoustic resonators; Micromechanical devices; Piezoelectric films; Radio frequency; Radiofrequency microelectromechanical systems; Resonant frequency; Resonator filters; Springs

Indexed keywords

ACOUSTIC RESONATORS; ACTUATORS; BANDPASS FILTERS; ELECTROMECHANICAL DEVICES; ELECTROMECHANICAL FILTERS; ELECTROSTATICS; FABRICATION; MEMS; MICROELECTROMECHANICAL DEVICES; MICROMECHANICAL RESONATORS; MICROSYSTEMS; MICROWAVE FILTERS; NATURAL FREQUENCIES; SPRINGS (COMPONENTS); TRANSDUCERS;

FILM BULK ACOUSTIC RESONATORS; MICROMECHANICAL DEVICE; PIEZOELECTRIC FILM; RADIO FREQUENCIES; RESONATOR FILTERS;

SOLID-STATE SENSORS;

EID: 84944723281     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215614     Document Type: Conference Paper

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