Low motional resistance ring-shaped contour-mode aluminum nitride piezoelectric micromechanical resonators for UHF applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 20-23

  Piazza, G ^a   Stephanou, P J ^a   Porter, J M ^a   Wijesundara, M B J ^a   Pisano, A P ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM NITRIDE; APPROXIMATION THEORY; ARRAYS; ELECTRIC RESISTANCE; LITHOGRAPHY; NATURAL FREQUENCIES; PIEZOELECTRIC DEVICES; RESONATORS;

MOTIONAL RESISTANCE; PIEZOELECTRIC RESONATORS; QUALITY FACTORS; TEMPERATURE COEFFICIENTS;

MICROELECTROMECHANICAL DEVICES;

EID: 26844434093     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

1. J. Wang, et al., "1.51-GHz Nanocrystalline Diamond Micromechanical Disk Resonator with Material-Mismatched Isolating Support", IEEE MEMS'04, pp. 641-644.
2. E. Quevy, et al., "Poly-SiGe High Frequency Resonators Based on Lithographic Definition of Nano-Gap Lateral Transducers", Hilton Head Workshop, June 2004, pp. 360-363.
3. S.-S. Li, et al., "Micromechanical "Hollow-Disk" Ring Resonators", IEEE MEMS'04, pp. 821-824.
4. B. Bircumshaw, et al., "The radial bulk annular resonator: towards a 50Ω MEMS Filter", Transducers '03, pp.875-878.
5. S. Pourkamali, et al., "18μm Thick High Frequency Capacitive HARPSS Resonators with Reduced Motional Resistance", Hilton Head Workshop, June 2004, pp. 392-393.
6. R. Ruby, et al., Y. Oshmyansky, "PCS 1900 MHz duplexer using thin film bulk acoustic resonators (FBARs)", Electronics Lett. 35, 794 (1999).
7. R. Aigner, et al., " RF-Filters in Mobile Phone Applications", Transducers '03, pp.891-894.
8. D.T. Chang, et al., "A new MEMS-based Quartz Resonator Technology", Hilton Head Workshop, June 2004, pp. 41-44.
9. G.Piazza, et al., "Dry-Released Post-CMOS Compatible Contour-Mode Aluminum Nitride Micromechanical Resonators for VHF Applications", Hilton Head Workshop, June 2004, pp. 38-41.