Vertical capacitive sibars

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2005, Pages 211-214

  Pourkamali, Siavash ^a   Ho, Gavin K ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CAPACITIVE RESONATORS; SILICON BULK ACOUSTIC RESONATORS (SIBAR); THICKNESS MODE;

ACOUSTIC DEVICES; CAPACITANCE; ELECTRIC IMPEDANCE; FABRICATION; NATURAL FREQUENCIES; SILICON;

RESONATORS;

EID: 26844520836     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

1. "Ultra-miniaturized and high performance PCS SAW duplexer with steep cut-off filters", MTT-S 2004, Vol. 2, pp.913-916.
2. R. C. Ruby, et al, "Thin film bulk wave acoustic resonators (FBAR) for wireless applications", Ultrasonics Symposium, 2001, Vol. 1, pp. 813-821.
3. S. Li, et al, "Micromechanical hollow disk ring resonators", MEMS 2004, pp. 821-824.
4. S. Pourkamali and F. Ayazi, "SOI-based HF and VHF single-crystal silicon resonators with sub-100nm nanometer vertical capacitive gaps", Transducers '03, pp.837-840.
5. S. Pourkamali, et al, "VHF single crystal silicon capacitive elliptic bulk-mode disk resonators part II: implementation and characterization", to appear in JMEMS, Vol. 13, No. 6, Dec 2004..
6. th Silicon RF topical meeting 2004, pp. 147-150.
7. A. S. Paulo, et al, "Atomic Force Microscopy characterization of electromechanical properties of RF acoustic bulk wave resonators", MEMS 2004, pp. 169-172.
8. J. D. Larson, et al, "Power handling and temperature coefficient studies in FBAR duplexers for the 1900 MHz PCS band", Ultrasonics Symposium, 2000, Vol. 1, pp.869 - 874.