VHF free-free beam high-Q micromechanical resonators

Journal of Microelectromechanical Systems

Volumn 9, Issue 3, 2000, Pages 347-360

  Wang, Kun ^a,b,c   Wong, Ark Chew ^a   Nguyen, Clark T C ^a  

^a University of Michigan   (United States)

^b DELPHI CORPORATION   (United States)

^c NANJING ELECTRONIC DEVICES INSTITUTE   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITE MICROMECHANICS; ELECTRIC IMPEDANCE; ELECTRIC LOSSES; MICROMACHINING; NATURAL FREQUENCIES; POLYSILANES; RESONATORS; STIFFNESS; TORSIONAL STRESS;

FREE-FREE-BEAM MICROMECHANICAL RESONATORS; MICRORESONATORS; TORSIONAL-MODE SUPPORT SPRINGS;

MICROELECTROMECHANICAL DEVICES;

EID: 0034269559     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/84.870061     Document Type: Article

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