Long-term evaluation of hermetically glass frit sealed silicon to Pyrex wafers with feedthroughs

Journal of Micromechanics and Microengineering

Volumn 15, Issue 8, 2005, Pages 1560-1564

  Sparks, Douglas ^a   Massoud Ansari, Sonbol ^a   Najafi, Nader ^a  

^a Integrated Sensing Systems Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ADSORPTION; DESORPTION; FREQUENCIES; GLASS; HERMETIC DEVICES; HIGH TEMPERATURE EFFECTS; MICROPROCESSOR CHIPS; RESONATORS; SILICON WAFERS; SINGLE CRYSTALS; THIN FILMS;

FEEDTHROUGH; GAS DESORPTION; GLASS FRIT; SILICON RESONATOR;

MICROELECTROMECHANICAL DEVICES;

EID: 22544480342     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/15/8/026     Document Type: Article

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