VHF single crystal silicon capacitive elliptic bulk-mode disk resonators - Part II: Implementation and characterization

Journal of Microelectromechanical Systems

Volumn 13, Issue 6, 2004, Pages 1054-1062

  Pourkamali, Siavash ^a   Hao, Zhili ^a   Ayazi, Farrokh ^a  

^a GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

HARPSS; Microresonator; Quality factor; Silicon on insulation (SOI); Temperature coefficient

Indexed keywords

ATMOSPHERIC PRESSURE; ELECTRODES; ELECTROSTATICS; MATHEMATICAL MODELS; NATURAL FREQUENCIES; POLYSILICON; RESONATORS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON ON INSULATOR TECHNOLOGY; SINGLE CRYSTALS; SUBSTRATES; TEMPERATURE;

HARPSS; MICRORESONATOR; QUALITY FACTOR; TEMPERATURE COEFFICIENT;

MICROELECTROMECHANICAL DEVICES;

EID: 10944220857     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2004.838383     Document Type: Article

References (16)

1. S. Y. No and F. Ayazi, "The HARPSS process for fabrication of nanoprecision silicon electromechanical resonators," in Proc. IEEE Conf. Nanotechnology, 2001, pp. 489-494. 10/28-30/01.
2. M. A. Abdelmoneum et al., "Stemless wine-glass-mode disk micromechanical resonators," in Proc. MEMS '03, pp. 698-701.
3. J. Wang et al., "Self-aligned 1.14-GHz vibrating radial mode disk resonators," in Proc. Transducers '03, pp. 947-950.
4. V. T. Srikar and S. D. Senturia, "Thermoelastic damping in fine-grained polysilicon flexural beam resonators," J. Microelectromech. Syst. vol. 11, no. 5, pp. 499-504, Oct. 2002.
5. V. Kaajakari et al., "Square-extentional mode single-crystal silicon micromechanical RF-resonator," in Proc. Transducers '03, pp. 951-954.
6. S. Humad et al., "High frequency micromechanical piezo-on-silicon block resonators," in Proc. IEDM '03, pp. 957-960.
7. F. Ayazi and K. Najafi, "High aspect-ratio combined poly and single-crystal silicon (HARPSS) MEMS technology," J. Microelectromech. Syst., vol. 9, p. 288, Sept. 2000.
8. F. Ayazi and K. Najafi, "A HARPSS polysilicon vibrating ring gyroscope," J. Mech. Syst., pp. 169-179, June 2001.
9. S. Pourkamali and F. Ayazi, "SOI-based HF and VHF single-crystal silicon resonators with sub-100 nm nanometer vertical capacitive gaps," in Proc. Transducers '03, pp. 837-840.
10. S. Y. No, A. Hashimura, S. Pourkamali, and F. Ayazi, "Single crystal silicon HARPSS capacitive resonators with submicron gap spacings," in Proc. Hilton Head 2002, Solid-State Sensor, Actuator and Microsystems Workshop, Hilton Head, SC, pp. 281-284.
11. S. Pourkamali et al., "High-Q single crystal silicon HARPSS capacitive beam resonators with self-aligned sub-100 nm transduction gaps," J. Microelectromech. Syst., pp. 487-496, Aug. 2003.
12. D. Kobayashi et al., "An integrated lateral tunneling unit," in Proc. MEMS '92, pp. 214-219.
13. J. Wang et al., "1.51 GHz nanocrystalline diamond micromechanical disk resonator with material-mismatched isolating supports," in Proc. MEMS '04, pp. 641-644.
14. S. Pourkamali, R. Abdolvand, and F. Ayazi, "A 600 kHz electrically coupled MEMS bandpass filter," in Proc. MEMS '03, 2003, pp. 702-705.
15. S. Y. Lin, "Coupled vibration and natural frequency analysis of isotropic cylinders or disks of finite dimensions," J. Sound Vibration, vol. 185, pp. 193-199, Aug. 1995.
16. N. H. Farag and J. Pan, "Modal characteristics of in-plane vibration of circular plates clamped at the outer edge," J. Acoust. Soc. Amer. vol. 113, no. 4, pp. 1935-1946, Apr. 2003.