Vibrating micromechanical resonators with solid dielectric capacitive transducer gaps

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn 2005, Issue , 2005, Pages 128-134

  Lin, Yu Wei ^a   Li, Sheng Shian ^a   Xie, Yuan ^a   Ren, Zeying ^a   Nguyen, Clark T C ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

Author keywords

Capacitive transducer; Fabrication yield; High quality factor; MEMS; Micromechanical; Motional resistance; Resonator

Indexed keywords

DIELECTRIC PROPERTIES; MICROPHONISM; RESONATORS; TRANSDUCERS; VIBRATIONS (MECHANICAL);

CAPACITIVE TRANSDUCER; FABRICATION YIELD; HIGH QUALITY FACTOR; MOTIONAL RESISTANCE;

MICROELECTROMECHANICAL DEVICES;

EID: 33645648699     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2005.1573914     Document Type: Conference Paper

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