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Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 23, Issue 3, 2005, Pages 877-894

Nanofabrication by scanning probe microscope lithography: A review

(3) Tseng, Ampere A a Notargiacomo, Andrea b,c Chen, T P d

a Arizona State University (United States)

b ROMA TRE UNIVERSITY (Italy)

c CNR (Italy)

d NANYANG TECHNOLOGICAL UNIVERSITY (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

MATERIAL STRUCTURES; NANOSCALES; SCANNING PROBE MICROSCOPY (SPM); SCIENTIFIC COMMUNITY;

ATOMIC FORCE MICROSCOPY; DEPOSITION; IMAGING TECHNIQUES; NANOSTRUCTURED MATERIALS; SCANNING TUNNELING MICROSCOPY; SPECTROSCOPIC ANALYSIS;

NANOTECHNOLOGY;

EID: 29044443869 PISSN: 10711023 EISSN: None Source Type: Journal
DOI: 10.1116/1.1926293 Document Type: Review

Times cited : (409)

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