Fabrication of Cr nanostructures with the scanning tunnelling microscope

Nanotechnology

Volumn 8, Issue 2, 1997, Pages 88-93

  Xie, W ^a   Dai, X ^b   Xu, L S ^c   Allee, D A ^d   Spector, J ^e  

^a INTEL CORPORATION   (United States)

^b NOKIA RESEARCH CENTER   (United States)

^c CYPRESS SEMICONDUCTOR   (United States)

^d Arizona State University   (United States)

^e Ross Technology Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHROMIUM; ELECTRIC CONDUCTIVITY OF SOLIDS; ETCHING; NANOSTRUCTURED MATERIALS; NANOTECHNOLOGY; OXIDATION; SCANNING TUNNELING MICROSCOPY; SEMICONDUCTING FILMS; SEMICONDUCTOR DEVICE STRUCTURES; THICKNESS MEASUREMENT;

QUANTUM STRUCTURES;

SEMICONDUCTOR DEVICE MANUFACTURE;

EID: 0031167308     PISSN: 09574484     EISSN: None     Source Type: Journal    
DOI: 10.1088/0957-4484/8/2/007     Document Type: Article

References (24)

1. Binnig G, Rohrer H, Gerber Ch and Weibel E 1982 Phys. Rev. Lett. 49 57
2. Binnig G and Rohrer H 1983 Surf. Sci. 126 236
3. Binnig G, Rohrer H, Gerber Ch and Weibel E 1983 Phys. Rev. Lett. 50 120
4. Hansma P K and Tersoff J 1987 J. Appl. Phys. 61 R1
5. Snow E S, Campbell P M and McMarr P J 1993 Appl. Phys. Lett. 63 749
6. Snow E S, Campbell P M and Shanabrook B V 1993 Appl. Phys. Lett. 63 3488
7. Day H C, Allee D R, George R and Burrows V A 1993 Appl. Phys. Lett. 62 1629
8. Song H J, Rack M J, Abugharbieh K, Khan V, Lee S Y, Ferry D K and Allee DR 1994 J. Vac. Sci. Technol. B 12 3720
9. McCord M A and Pease R F W 1986 J Vac. Sci. Technol. B 4 86
10. McCord M A and Pease R F W 1987 J Vac. Sci. Technol. B 5 430
11. McCord M A and Pease RFW 1988 J. Vac. Sci. Technol. B 6 293
12. Albrecht T R, Dovek M M, Kirk M D, Lang C A, Quate C F and Smith DPE 1989 Appl. Phys. Lett. 55 1727
13. Chok Kho Lipe 1994 A Study on the Effects of Scanning Tunneling Microscope Arizona State University M S Thesis
14. Dagata J A, Schneir J, Harary H H, Evans C J, Postek M T and Bennett J 1990 Appl. Phys. Lett. 56 2001
15. Jahanmir J, West P E, Hsieh S and Rhodin T N 1989 J. Appl. Phys. 65 2064
16. Nagahara L A, Thundat T and Lindsay S M 1990 Appl. Phys. Lett. 57 270
17. McCord M A, Kern D P and Chang T H P 1988 J. Vac. Sci. Technol. B 6 1877
18. Thundat T, Nagahara L A and Lindsay S M 1990 J. Vac. Sci. Technol. A 8 539
19. Li W, Virtanen J A and Penner R M 1992 Appl. Phys. Lett. 60 1181
20. Matsumoto K, Ishii M, Segawa K, Oka Y, Vartanian B J and Harris J S 1994 Extended Abstracts of 1994 Int. Conf. of Solid State Devices and Materials, Yokohama 46
21. Staufer U 1992 Surface modification with a scanning proximity probe microscope in Scanning Tunneling Microscope II ed R Wiesendanger and H-J Gunterodt, Spring Series in Surface Science (Berlin: Springer) vol 28
22. Likharev K K and Claeson T 1992 Sci. Am. 80 June
23. Hess K and Iafrate G J 1992 IEEE Spectrum 44 July
24. Aharonov Y and Bohm D 1959 The Physics Review Second Series 115 485 August