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Volumn 7, Issue 2, 1996, Pages 106-109
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Selective area oxidation of Si3N4 with an ambient scanning tunneling microscope
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Author keywords
[No Author keywords available]
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Indexed keywords
ETCHING;
HYDROFLUORIC ACID;
MICROSCOPES;
OXIDATION;
SCANNING TUNNELING MICROSCOPY;
SEMICONDUCTING SILICON;
THIN FILMS;
SELECTIVE AREA OXIDATION;
SILICON NITRIDE;
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EID: 0030171555
PISSN: 09574484
EISSN: None
Source Type: Journal
DOI: 10.1088/0957-4484/7/2/002 Document Type: Article |
Times cited : (8)
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References (19)
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