Nanoscale modification of conducting lines with a scanning force microscope

Vacuum

Volumn 48, Issue 5, 1997, Pages 467-472

  Rank, R ^a   Bruckl H ^a   Kretz, J ^a   Monch I ^a   Reiss, G ^a  

^a IFW DRESDEN   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; ELECTRIC CONDUCTIVITY MEASUREMENT; ELECTRIC CONDUCTIVITY OF SOLIDS; GOLD ALLOYS; INTEGRATED CIRCUIT MANUFACTURE; MICROSCOPIC EXAMINATION; SURFACE TREATMENT;

SCANNING FORCE MICROSCOPY;

CONDUCTIVE FILMS;

EID: 0039384158     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(96)00308-9     Document Type: Article

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