Fabrication of surface nanostructures by scanning tunneling microscope induced decomposition of SiH4 and SiH2Cl2

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 15, Issue 4, 1997, Pages 1373-1377

  Rauscher, H ^a   Behrendt, F ^a   Behm, R J ^a  

^a UNIVERSITY OF ULM   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0006366641     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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