AFM tip induced selective electrochemical etching of and metal deposition on p-GaAs(100) surface

Surface Science

Volumn 357-358, Issue , 1996, Pages 565-570

  Koinuma, Michio ^a   Uosaki, Kohei ^a  

^a HOKKAIDO UNIVERSITY   (Japan)

Author keywords

Atomic force microscopy; Copper; Electrochemical methods; Etching; Gallium arsenide; Low index single crystal surfaces; Models of surface chemical reactions; Semiconducting surfaces; Semiconductor electrolyte interfaces; Solid liquid interfaces

Indexed keywords

ATOMIC FORCE MICROSCOPY; CHEMICAL REACTIONS; COPPER; DEPOSITION; DISSOLUTION; ELECTRODES; ETCHING; MATHEMATICAL MODELS; SCANNING; SEMICONDUCTING GALLIUM ARSENIDE; SURFACE ROUGHNESS; SURFACE STRUCTURE;

ELECTROCHEMICAL METHODS; LOW INDEX SINGLE CRYSTAL SURFACES; METAL DEPOSITION; SEMICONDUCTING SURFACES; SEMICONDUCTOR ELECTROLYTE INTERFACES; SURFACE TOPOGRAPHY;

SURFACES;

EID: 13544257615     PISSN: 00396028     EISSN: None     Source Type: Journal    
DOI: 10.1016/0039-6028(96)00224-5     Document Type: Article

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