Fabrication of submicron suspended structures by laser and atomic force microscopy lithography on aluminum combined with reactive ion etching

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 6, 1998, Pages 2977-2981

  Boisen, A ^a   Birkelund, K ^a   Hansen, O ^a   Grey, F ^a  

^a TECHNICAL UNIVERSITY OF DENMARK   (Denmark)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 11744357898     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590329     Document Type: Article

References (19)

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