Application of scanning tunneling microscopy nanofabrication process to single electron transistor

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 2, 1996, Pages 1331-1335

  Matsumoto, Kazuhiko ^a   Ishii, Masami ^a   Segawa, Kazuhito ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001137190     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589091     Document Type: Article

References (7)

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7. K. Matsumoto, S. Takahashi, M. Ishii, M. Hoshi, A. Kurokawa, S. Ichimura, A. Ando, in Extended Abstracts of 1994 International Conference of Solid State Device and Materials, Yokohama, Japan, 1994, p. 46.