Formation of c-BN thin films under reduced ion impact

Surface and Coatings Technology

Volumn 92, Issue 1-2, 1997, Pages 129-134

  Hahn, J ^a   Richter, F ^a   Pintaske, R ^a   Roder M ^a   Schneider, E ^a   Welzel, Th ^a  

^a CHEMNITZ UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

c BN thin films; Magnetron sputtering

Indexed keywords

CUBIC BORON NITRIDE; FILM GROWTH; MAGNETRON SPUTTERING; NITROGEN;

ION IMPACT; LANGMUIR PROBES;

THIN FILMS;

EID: 0031166113     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(96)03178-7     Document Type: Article

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