Role of ion energy in determination of the sp3 fraction of ion beam deposited carbon films

Applied Physics Letters

Volumn 68, Issue 9, 1996, Pages 1214-1216

  Grossman, E ^a   Lempert, G D ^a   Kulik, J ^b   Marton, D ^b   Rabalais, J W ^b   Lifshitz, Y ^a  

^a SOREQ NUCLEAR RESEARCH CENTER   (Israel)

^b UNIVERSITY OF HOUSTON   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0000713325     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115973     Document Type: Article

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