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Volumn 88, Issue 10, 2000, Pages 5597-5604

Hydrogen-plasma etching of ion beam deposited c-BN films: An in situ investigation of the surface with electron spectroscopy

(5) Reinke, P a Oelhafen, P a Feldermann, H b Ronning, C b Hofsass H b

a UNIVERSITY OF BASEL (Switzerland)

b UNIVERSITY OF GÖTTINGEN (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0037832816 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.1320031 Document Type: Article

Times cited : (24)

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